大口径、高精度二维快速控制平面反射镜系统设计

Design of two-dimensional fast steering mirror system with large aperture and high precision

为解决光电跟踪仪跟踪精度测量过程中光束大范围指向的模拟问题,设计了一种大口径、高精度二维快速控制反射镜(fast steering mirror,FSM)。采用微晶材料设计了长、短轴分别为230 mm和160 mm的椭圆形平面反射镜,面形精度优于λ/30。采用音圈电机驱动,通过柔性支撑铰链设计及DSP嵌入式控制系统,运动行程达到±30 mrad,运动控制精度达到5μrad,运动控制线性度优于±0.20%,角分辨率优于1μrad。通过软件控制,实现对入射光束圆形轨迹运动、直线轨迹运动、随机运动等形式的运动模拟。最后,对设计指标进行实际测试,可以满足跟踪精度光束动态模拟的测试需求。

In order to solve the simulation problem of beam pointing in a wide range during the tracking accuracy measurement of photoelectric tracker,a two-dimensional fast steering mirror(FSM)with large aperture and high accuracy was designed.An elliptic and microcrystalline plane mirror was designed with long and short axes of 230 mm and 160 mm respectively,and the surface accuracy was better thanλ/30.Driven by the voice coil motors and supported by the flexible support hinges and DSP embedded control system,the swing angle range was±30 mrad,the motion control accuracy was 5μrad,the motion control linearity was better than±0.20%,and the angular resolution was better than 1μrad.Through the software control,the circular,linear and random motion of the incident beam could be simulated.Finally,the design indicators were tested,which could meet the requirements of tracking accuracy dynamic beam simulation.