摘要
极紫外-真空紫外高性能薄膜光学元件大幅提升了高精度观测能力,助力了天文、材料、物理等学科发展。同济大学精密光学工程技术研究所根据不同应用需求以及薄膜材料自身的物理化学特性,开展了针对高性能极紫外-真空紫外薄膜光学元件的广泛深入研究,成功研制了诸如Mg/SiC、Sc/Si、Yb/Al、Al+LiF+eMgF_(2)、LaF_(3)/MgF_(2)等多种高性能薄膜反射镜,以满足极紫外-真空紫外(25~200 nm)全波段的应用需求,这些高性能薄膜反射镜已在诸多国内大型地面科学装置及空间天文观测设备中得到应用。简要介绍同济大学精密光学工程技术研究所在极紫外-真空紫外薄膜光学元件研制工作中取得的进展。
Extreme ultraviolet(EUV)and vacuum ultraviolet(VUV)high-performance thin film optical elements greatly improve the capability of high-precision observation,and contribute to the development of astronomy,materials,physics,and other disciplines.According to the different application requirements as well as physical and chemical properties of materials,the Institute of Precision Optical Engineering(IPOE)in Tongji University has successfully developed amounts of high-performance thin film mirrors,such as Mg/SiC,Sc/Si,Yb/Al,Al+LiF+eMgF_(2),and LaF_(3)/MgF_(2),which can meet the requirements of application in whole EUV and VUV wavelength ranges(25--200 nm).These mirrors are already applied to domestic large-scale scientific instrument(from ground to space).This paper briefly introduces the research progress obtained by IPOE during the development of EUV and VUV thin film optical elements.
作者
齐润泽
张锦龙
吴佳莉
李双莹
黄秋实
张众
王占山
Qi Runze;Zhang Jinlong;Wu Jiali;Li Shuangying;Huang Qiushi;Zhang Zhong;Wang Zhanshan(Key Laboratory of Advanced Micro-Structured Materials,Ministry of Education,Institute of Precision Optical Engineering,School of Physics Science and Engineering,Tongji University,Shanghai 200092,China)
出处
《光学学报》
EI
CAS
CSCD
北大核心
2022年第11期40-50,共11页
Acta Optica Sinica
基金
中国科学院战略性先导科技专项(XDA15018400)
国家自然科学基金(12003016)
上海市教育委员会的创新计划(2017-01-07-00-07-E00063)。
关键词
X射线光学
极紫外-真空紫外
薄膜元件
窄带宽
稳定性
高反射率
X-ray optics
extreme ultraviolet and vacuum ultraviolet
thin film elements
narrow bandwidth
stability
high reflectivity
