摘要
飞秒光纤激光器具有脉宽极短,瞬时功率高,对加工材料无选择性等特点,被广泛应用于精密微孔制造领域。为此,提出了一种高精度轨迹可调光束扫描系统,利用电机控制偏转光楔组和平行平板组相对于激光光轴的角度,再通过聚焦透镜缩小光斑,实现精准控制下飞秒激光的旋转扫描,解决了目前高深径比、倒锥孔加工困难的问题。将该系统应用于汽车喷油嘴油孔加工,实现了加工孔径的孔径为25~800μm,孔径误差≤±2μm;在锥度孔加工中可实现微孔锥度-5°~+5°;实现了深径比为20∶1的微孔加工。
A femtosecond fiber laser is extensively used in the field of precision micro-hole manufacturing because of its short pulse width, high instantaneous power, and nonselectivity for processing materials. This study proposes a high-precision trajectory adjustable beam scanning system, which uses a motor to control the angle of the deflection wedge group and the parallel plate group relative to the laser optical axis. Then, it narrows the spot through a focusing lens to achieve precise control of femtosecond laser rotation scanning. Moreover, it solves the current problems of high depth-to-diameter ratio and difficult inverted taper hole machining. The system is applied for processing the oil hole of the automobile fuel injector, and the aperture of the processing aperture is 25-800 μm,and the aperture error is ≤±2 μm. A micro-hole taper can be achieved at-5° -+5° in taper hole processing.Micro-hole machining with a depth-to-diameter ratio of 20∶1 is achieved.
作者
王珊
赵卫
赵华龙
周峰
刘国强
杨小君
Wang Shan;Zhao Wei;Zhao Hualong;Zhou Feng;Liu Guoqiang;Yang Xiaojun(State Key Laboratory of Transient Optics and Photonics,Xi’an Institute of Optics and Precision Mechanics,Chinese Academy of Sciences,Xi’an 710119,Shaanxi,China;University of Chinese Academy of Sciences,Beijing 100049,China;FAW Wuxi Fuel Injection Equipment Research Institute,Wuxi 214063,Jiangsu,China;Xi’an Micromach Technology Co.,Ltd.,Xi’an 710119,Shaanxi,China)
出处
《激光与光电子学进展》
CSCD
北大核心
2022年第11期381-388,共8页
Laser & Optoelectronics Progress
基金
国家重点研发计划(2018YFB1108000)。
关键词
光学设计
飞秒激光加工
倒锥孔
高深径比
喷油嘴
optical design
femtosecond laser processing
inverted cone hole
high depthtodiameter ratio
fuel injector
