薄膜压力传感器温度灵敏度补偿工艺研究

Research on Temperature Sensitivity Compensation Technology of Thin Film Pressure Sensor

利用光刻技术制作压力传感器温度灵敏度补偿电阻图形,以纯度99.99%的镍为靶材,采用溅射的原理,将镍原子溅射到工件上,最后形成薄膜补偿电阻。测试薄膜电阻值,根据公式计算出补偿电阻的阻值,通过激光调阻机将电阻值调到理论计算值,进行压力传感器的补偿试验。结果表明,采用溅射薄膜的补偿电阻精度优于传统的电阻元器件补偿结果,温度灵敏度补偿精度可以达到0.003%F.S,优于传统的补偿精度。

The temperature sensitivity compensation resistance pattern of the pressure sensor is fabricated by photolithography.Nickel with a purity of 99.99%is used as the target material.The nickel atoms are sputtered onto the workpiece by the sputtering principle,and finally the thin film compensation resistance is formed.The film resistance value is tested,the resistance value of the compensation resistance is calculated according to the formula,the resistance value is adjusted to the theoretical calculation value through the laser resistance trimming machine,and the compensation test of the pressure sensor is performed.The results show that the compensation resistance accuracy of the sputtered film is better than that of the traditional resistance components,and the temperature sensitivity compensation accuracy can reach 0.003%F.S,which is better than the traditional compensation accuracy.