应急电源系统在芯片制造工厂中的应用

Application of Emergency Ppower Supply Ssystem in Chip Manufacturing Factory

结合半导体芯片产业的发展现状,介绍了芯片制造的主要工艺流程和电网干扰对芯片制造工厂的影响。重点对应急电源进行分类与比较,并就应急电源在芯片工厂的应用给出工程实例,给广大工程技术人员在进行芯片厂房建厂时,提供了新的解决方案。

Combined with the development status of semiconductor chip industry,this paper introduces the main process flow of chip manufacturing and the impact of power grid interference on chip manufacturing factories.This paper focuses on the classification and comparison of emergency power supply,and gives an engineering example of the application of emergency power supply in chip factory,which provides a new solution for the majority of engineers and technicians in the construction of chip factory.