多晶硅循环氢中氮含量升高原因及解决措施

Reasons and Solutions of Nitrogen Content Increase in Circulating Hydrogen of Polysilicon

分析了多晶硅生产过程循环氢中氮含量升高的原因。从三氯氢硅供料、还原工序工艺优化调整、压缩机检维修投用等方面采取了措施,有效降低了循环氢中氮含量,提高了循环氢气的质量,有助于提升多晶硅产品的品质。

The reasons for the increase of nitrogen content in circulating hydrogen in polysilicon production were analyzed,and measures were taken from the aspects of trichlorosilicon feeding,reduction furnace process optimization and adjustment,compressor inspection and maintenance,etc.,which can effectively reduce the nitrogen content in circulating hydrogen,further improve the quality of circulating hydrogen,and help to improve the quality of polysilicon products.