非晶合金脉冲激光加工适应性

Adaptability of Amorphous Alloys to Pulsed Laser Processing

分别采用脉冲宽度为100 ns、3 ps激光对厚度为80μm的Zr-21Cu-4Al-1Ti(ZT1)非晶合金进行切割试验,研究激光加工非晶合金的适应性。结果表明:纳秒激光加工的热效应明显,加工区域存在重铸、裂纹、飞溅等典型的热致缺陷,并且在外侧形成了较大范围的晶化区域,晶化区域的材料表面具有独特的纹理和颜色。皮秒激光可实现近“冷”加工,加工区域呈现非热熔性去除形貌,无重铸、裂纹、飞溅等热致缺陷,并且未发现晶化。在大气环境、多脉冲、高能量密度等条件下,纳秒、皮秒激光的加工区域均出现了不同程度的氧化。前者发生在整个热影响区表面,后者只发生在激光辐照区域。

The ZT1 amorphous alloy film with a thickness of 80 μm was ablated and cut in different laser(100 ns、3 ps) to study the adaptability of laser processing amorphous alloy. Results show that the thermal effect of nanosecond laser processing was obvious, typical thermal defects such as recast, crack and spatter existed, and a large range of crystallization area with special textures and colors was formed on the outside. The effect of "cold" processing was obtained by picosecond laser, and no recast, crack, spatter and crystallization were found. Under the conditions of atmosphere, multi-pulse, high laser energy density, oxidation occurred to some extent in the processing area of nanosecond and picosecond laser. The former occurred on the surface of the whole heat affected zone, while the latter only occurred in the laser irradiated zone.