聚焦离子束扫描电镜的三维图像配准方法研究

Study on three-dimensional image registration method of focused ion beam-scanning electron microscope

该研究探索了一种用于聚焦离子束扫描电镜(focus ion beam-scanning electron microscope,FIB-SEM)的三维序列图像配准新方法,即对特定参照物分割后,将Z轴序列图像转化为时间序列图像,利用IMARIS软件的时间序列追踪算法对相邻帧图像之间的位错进行纠正,从而达到配准的目的。配准的结果使得Z轴序列图像中锯齿状位错大为减少,图像和结构更清晰完整。针对同一套FIB-SEM序列图像的数据,其纠错效果与传统AMIRA软件实现的配准相比,效果达到预期,操作更加简便有效。该研究为电镜三维图像的位置配准提供了新方法。

This study explores a new method of three-dimensional sequence image registration for focus ion beam scanning electron microscope(FIB-SEM).After segmenting a specific reference,the Z-axis sequence image is transformed into a time series image,and the dislocation between adjacent frame images is corrected by using the time series tracking algorithm of IMARIS software,so as to achieve the purpose of registration.The result of registration makes the zig-zag dislocations in the Z-axis sequence images greatly reduced,and the image and structure more clear and complete.For the data of the same set of FIB-SEM sequence images,the error correction effect is as expected compared with the registration realized by the traditional AMIRA software,and the operation is more simple and effective.This study provides a new method for position registration of electron microscope three-dimensional images.