电导率调控介孔二氧化硅增透膜透过性能的研究

Study on permeability of mesoporous silica antireflective film regulated by conductivity

以正硅酸乙酯(TEOS)为前驱体,三嵌段共聚物(F127)为模板剂,利用酸催化的形式通过溶胶-凝胶法制备介孔二氧化硅增透膜液。采用浸渍提拉法在硼硅玻璃基片上进行镀膜,利用马弗炉对膜层进行固化处理。采用紫外可见分光光度计、电导率仪对膜的透过性能及膜液的电学性能进行分析。结果表明,溶剂在6个月的长期挥发下会导致膜液电导率由243μS/cm增大到266μS/cm,相同的提拉速度会使得膜层变厚,透过率峰值出现“红移”现象,300~2500 nm的平均透光率由96.7%降为96.0%。通过对实验所得数据进行拟合可知,膜液电导率与二氧化硅浓度成简单的线性关系,与最优提拉速度成单指数函数关系,使用膜液电导率对标稀释的方法可使所镀膜层透过率得到恢复,能在不影响生产效率的前提下保证膜层产品的一致性。

Mesoporous silica antireflective film solution was prepared by sol-gel process in the form of acid catalysis with tetraethyl orthosilicate(TEOS)as precursor and triblock copolymer(F127)as template.The film was coated on borosilicate glass by dip coating method and curing treated by muffle furnace.Uv-visible spectrophotometer and conductivity meter were used to characterize transmittance of the films and electrical properties of the sol.The results showed that the conductivity of the sol increased from 243μS/cm to 266μS/cm under long⁃term exposure for 6 months,and the same pulling speed re⁃sulted in the increase of layer thickness.The transmittance peak showed a red shift and the average transmittance within the range of 300~2500 nm decreased from 96.7%to 96.0%.Experimental data fitting showed that electric conductivity had a good linear relationship with SiO2 concentration and a good single exponential relationship with optimal pulling speed.The transmittance of the sol would be recovered by conductivity control using the method of dilution,it did not affect the produc⁃tion efficiency and could also guarantee the consistency of film products.