小型单聚焦磁偏转质谱计及校准研究

Calibration Study on the Single-focusing Compact Magnetic Sector Mass Spectrometer

介绍了自主研制的单聚焦小型磁偏转质谱计物理单元和电路系统的设计参数及结构组成。对单聚焦小型磁偏转质谱计的质量数范围、分辨率和灵敏度进行了校准实验研究。研究结果表明,单聚焦小型磁偏转质谱计的质量数范围为1~134 amu,相对分辨率为35,电子倍增器模式下N_(2)、Ar和He的灵敏度分别为1.6×10^(-4)A/Pa、1.2×10^(-4)A/Pa和2.3×10^(-5) A/Pa。研制的单聚焦小型磁偏转质谱计在真空检漏和质谱分析领域具有广泛应用需求。

The design parameters and structural components of the physical unit and circuit system of the self-developed single-focusing compact magnetic sector mass spectrometer were introduced.Its mass range,resolution and sensitivity have been calibrated.The results show that the mass range of the small mass spectrometer is 1~134 amu,the resolving power is 35,and the sensitivity of N_(2),Ar and He in secondary electron multiplier(SEM)mode is 1.6×10^(-4) A/Pa,1.2×10^(-4) A/Pa and 2.3×10^(-5) A/Pa,respectively.The proposed compact magnetic sector mass spectrometer is widely used in the field of vacuum leak detection and mass spectrometry.