两种电容效应的六维力传感器结构设计及解耦

Design and Decoupling of a Six-Axis Force Sensor with Two Kinds of Capacitor Effects

提出了一种新型电容式六维力传感器,理论分析垂直极板电容边缘效应原理和变极距型平行极板电容效应原理,设计了结合两种电容效应原理的新型电容式力传感器结构。进行静态标定实验获得实验数据,将获得的数据采用基于最小二乘法的线性解耦求得六维力传感器解耦矩阵。并根据求得的解耦矩阵对六维力传感器进行解耦计算,计算结果表明:传感器各维力/力矩F_(X)、F_(Y)、F_(Z)、M_(X)、M_(Y)、M_(Z)的Ⅰ类误差分别为0.19%、0.66%、0.10%、0.14%、0.39%、0.32%,Ⅱ类误差最大值为0.47%,即该传感器维间耦合小,可解耦。验证了该结构的可行性。

A novel capacitive-type six-axis force sensor was proposed.Analyzing the principle of vertical plate capacitor edge effect and the principle of variable pole-parallel plate capacitor effect theoretically.Combining the two capacitor effect principles,a novel capacitive-type force sensor structure was designed.The static calibration experiment was carried out to obtain the experimental data,and the obtained data was obtained by linear decoupling which was based on the least squares method to obtain the six-axis force sensor decoupling matrix.The decoupling calculation of the six-axis force sensor was carried out according to the obtained decoupling matrix.The calculation results showed that the class Ⅰ errors of the sensor force/torque F_(X)、F_(Y)、F_(Z)、M_(X)、M_(Y) and M_(Z) were 0.19%,0.66%,0.10%,0.14%,0.39% and 0.32%,respectively.And the maximum error of class Ⅱ was 0.47%,that is,the sensor has small inter-dimensional coupling and the sensor can be decoupled.It is verified that the feasibility of the structure.