长导轨直线度分段测量拼接方法研究

Research on Stitching Method for Segment Straightness Measurement of the Long Guideway

激光干涉仪测量超长导轨直线度时,因导轨长度超出干涉仪直线度测量范围,需分段测量后拼接,测量数据易受噪声和激光漂移等因素影响,导致拼接可能引入较大误差。通过分析拼接过程中的影响因素,结合长导轨结构特性,提出了一种将拼接公共点分布在相邻两节子导轨上,利用相邻两节子导轨夹角的稳定特性来实现长导轨直线度拼接的方法。通过仿真与实验,对比了30 m范围内的直接测量法与坐标变换拼接法的测量结果,2种方法的直线度结果相差<10μm,表明所提出的方法能有效减小拼接误差。将此方法应用于72 m导轨的直线度测量,并与电子水平仪测量方法比较,2种方法结果相差10μm,表明所提出的方法可实现高精度的直线度拼接。

When using the interferometer to measure the straightness of the ultra-long rail,the stitching may introduce a large error due to the length of the rail exceeding the measurement range of the interferometer,since the straightness of the whole long guide rail needs to be divided into multiple sections and then each straightness is measured separately.By analyzing the influencing factors in the splicing process,and combined with the structural characteristics of long guide rails,a new straightness splicing method for long guide rails is proposed.This method uses common points distributed on two adjacent sub-guide rails for splicing,and uses the stable characteristic of the angle between two adjacent sub-guide rails to realize straightness splicing.Through simulation and experiment,the measurement results of the direct measurement method and the coordinate transformation splicing method in the range of 30 m are compared,and the difference of straightness results between the two methods is less than 10μm,which shows that the proposed method can effectively reduce the stitching error.Finally,this method is applied to the straightness measurement of 72 m rail,and compared with the electronic level measurement method,the difference of the two results methods is 10μm,which indicated that the proposed method can achieve high-precision straightness stitching.