磁控溅射和多弧离子镀制备Cr涂层Zr-4合金的微观结构和抗高温氧化性能

Microstructure and high temperature oxidation resistance of Cr-coated Zr-4 alloy prepared by magnetron sputtering and multi-arc ion plating

为了对比研究磁控溅射和多弧离子镀两种工艺制备的Cr涂层Zr-4合金微观结构和抗高温氧化性能,分别采用直流磁控溅射和多弧离子镀制备了Cr涂层Zr-4合金样品,在空气气氛中开展高温氧化试验研究。结果表明,磁控溅射制备的Cr涂层Zr-4合金样品表面光滑,Cr涂层沿着(211)晶面择优生长,而多弧离子镀制备的Cr涂层Zr-4合金样品表面存在大量的滴液,Cr涂层沿着(110)晶面择优生长。高温氧化试验结果显示,磁控溅射制备的Cr涂层Zr-4合金样品的氧化质量增加约为多弧离子镀的一半,氧化后的微观结构显示磁控溅射制备的样品还有约4μm厚的残留Cr涂层,且O原子仅仅大量扩散到距表面约8μm处,而多弧离子镀制备的样品表面Cr涂层全部被氧化,且O原子大量扩散到距样品表面约1 mm深处的Zr-4合金基体中。因此,磁控溅射制备的Cr涂层Zr-4合金具有更好的抗高温氧化性能。

In order to compare the microstructure and high temperature oxidation resistance of Cr-coated Zr-4 alloy prepared by magnetron sputtering and multi-arc ion plating,Cr-coated Zr-4 alloy were prepared by DC magnetron sputtering and multi-arc ion plating,respectively.And the high temperature oxidation resistance was studied in air atmosphere.The results show that the Cr-coated Zr-4 alloy specimen prepared by magnetron sputtering has smooth surface,and the Cr coating grows preferentially along the(211)crystal plane,while there are a lot of droplets on the surface of the Cr-coated Zr-4 alloy specimen prepared by multi-arc ion plating,and the Cr coating grows preferentially along the(110)crystal plane.The results of high-temperature oxidation experiments show that the oxidation mass gain of the Cr-coated Zr-4 alloy specimen prepared by magnetron sputtering is about half of that of the multi-arc ion plating.The oxidized microstructure shows that the specimen prepared by magnetron sputtering still has a residual Cr coating with a thickness of about 4μm,and the O atoms only diffuse to a distance of about 8μm from the surface,while the Cr coating of the specimen prepared by multi-arc ion plating was completely oxidized,and a large number of O atoms diffused into the Zr-4 alloy matrix at a depth of about 1 mm from the surface of the specimen.Therefore,the Cr-coated Zr-4 alloy prepared by magnetron sputtering has better high temperature oxidation resistance.