TiO_(2)/PI复合薄膜对湿度传感器性能的影响

Effect of TiO_(2)/PI composite thin film on performance of humidity sensor

基于二氧化钛/聚酰亚胺(TiO_(2)/PI)复合感湿材料,设计并制备了一种叉指结构电容式湿度传感器。为了提高传感器的灵敏度,缩短响应时间,对复合薄膜中TiO_(2)的含量及复合薄膜的厚度进行了研究和优化。实验结果表明:与未引入TiO_(2)的PI湿度传感器相比,TiO_(2)质量分数为5%的湿度传感器灵敏度提高了97%,且线性度良好(R^(2)=0.991);针对叉指结构设计合理的复合薄膜厚度,能将传感器的响应时间和恢复时间分别显著缩短至33 s和38 s。该研究可为电容式湿度传感器的湿敏薄膜材料配制和厚度优化提供有益的参考。

A series of capacitive humidity sensors with interdigital electrodes are designed and fabricated based on the titanium dioxide/polyimide(TiO_(2)/PI)composite moisture-sensitive material.In order to improve the sensitivity and shorten the response time,the content of TiO_(2)and the thickness of the composite film are investigated and optimized.The experimental results demonstrate that,comparing to the pure PI humidity sensors,the sensitivity of TiO_(2)/PI humidity sensors with 5 wt%TiO_(2)increases by 97%,and has high linearity of R^(2)=0.991.An optimized thickness of the humidity-sensing film coordinates with the interdigital-electrode design can significantly shorten the response and recovery time to 33 s and 38 s,respectively.The research results provide valuable references for the preparation of humidity-sensitive layer and thickness optimization of capacitive humidity sensors.