X射线反射镜NiP芯模超精密车削技术研究

Research on ultra-precision turning technology of NiP-coated mandrel for X-ray mirrors

以聚焦型X射线反射镜的镍磷合金芯模为研究对象,研究了单点金刚石超精密车削的切削深度、主轴转速、进给量等工艺参数对表面粗糙度的影响关系。结果表明,进给量对加工表面粗糙度影响相对最大,主轴转速、切削深度的影响呈弱相关关系。开展了NiP合金超精密车削工艺试验,得到切削深度、主轴转速、进给量的优化工艺参数,并初步建立了表面粗糙度预测模型。在此基础上,对Φ110mm×140mm的X射线反射镜镍磷合金芯模进行加工验证,获得了PV61.37~83.47nm、RMS7.952~10.326 nm、Ra6.379~8.332 nm的表面粗糙度,圆度误差0.39μm、斜率误差均方根值0.42μm,满足X射线反射镜对芯模超精密车削需求,为后续大规格X射线反射镜超精密制造奠定了技术基础。

The ultra-precision turning performance of electroless nickel-coated mandrels which are used for the replication of X-ray mirrors.Effects of single-point diamond turning parameters such as depth of cut,spindle speed,and feed rate on the surface roughness are studied.The experimental results show that the feed rate has a significant influence on the surface roughness,while the spindle speed and depth of cut have no obvious influence on it.The process experiment of NiP alloy ultra-precision turning was carried out,the optimized process parameters of cutting depth,spindle speed and feed rate were obtained,and the surface roughness prediction model was established.The optimized process parameters were applied on manufacturing of electroless nickelcoated mandrels with diameter of 110 mm and length of 140 mm.The mandrel has been successfully machined to about PV61.37-83.47 nm,RMS7.952-10.326 nm,Ra6.379-8.332 nm,roundness 0.39 μm,slope error of the profile 0.42 μm.The above results meet the manufacturing requirements of the X-ray mirrors,which prepares the technical storage for manufacturing of larger X-ray mirrors.