干式超声清洗变截面空腔流场特性仿真分析

Simulation Analysis of Flow Field Characteristics of Variable Cross Section Cavity In Dry Ultrasonic Cleaning

针对显示器及半导体在制造过程中表面粘附微纳粉尘颗粒清洗不彻底的问题,设计了一种干式超声波清洗头,重点对其关键结构变截面空腔进行了研究分析。采用可压缩Navier-Stokes方程及Favre滤波处理建立了变截面空腔任意曲线坐标下的大涡模拟计算模型,利用ANSYS Fluent17.0对变截面空腔出口流场特性进行仿真模拟。针对不同空腔长深比、入口气流速度、空腔组数和腔口长度等因素,研究分析了变截面空腔出口气流速度、频率以及振幅的影响规律。结果表明,空腔长深比和入口气流速度大小对腔口流场特性的影响最大,腔口长度以及空腔组数对变截面空腔出口流场特性的影响较小,合理的变截面空腔结构参数组合能够产生稳定的超声频正弦波气流。研究结果可为干式超声清洗头的设计与工业应用提供理论指导。

In order to solve the problem of incomplete cleaning of micro-nano dust particles adhered to the surface of display and semiconductor in the manufacturing process,a dry ultrasonic cleaning head was designed,and its key structure variable section cavity was investigated and analyzed in this paper.The large eddy simulation calculation model of variable cross-section cavity in arbitrary curvilinear coordinates was established by using compressible Navier Stokes equation and Favre filtering.The model for flow field characteristics of variable cross-section cavity outlet was simulated by using ANSYS Fluent 17.0 software.The influence of cavity length depth ratio,inlet gas velocity,cavity group number and cavity length on the flow velocity,frequency and amplitude of variable cross-section cavity outlet was investigated.The results show that the length depth ratio and the inlet velocity have the greatest influence on the flow field characteristics,while the length of the cavity and the number of cavity groups have little influence on the flow field characteristics of the variable cross-section cavity exit,and the optimal combination of cavity structure parameters can generate the sinusoidal wave with ultrasonic frequency.The research results provide theoretical guidance for the design and industrial application of dry ultrasonic cleaning heads.