斜槽式单激励纵扭超声变幅杆设计

The design of multiple diagonal slits ultrasonic horn with single-excitation longitudinal-torsional vibration

为实现在纵向单激励超声振动输入条件下获得纵扭谐振输出,基于声波传播理论,设计了一种阶梯型变幅杆,在其输出端增加了一段周向均布6个斜槽的圆环传振杆。首先进行理论设计,然后使用有限元进行分析修正,最后确定变幅杆尺寸。结果表明:理论设计谐振频率20 kHz,仿真分析在19457 Hz时变幅杆能够实现纵扭谐振;根据仿真结果制作变幅杆,阻抗测试结果谐振频率为19884 Hz,与理论值、仿真值误差较小;在输入端加载幅值为5µm的纵向单激励超声振动,测试输出端截面圆周上任意一点,其切向和纵向振幅分别为12.7µm和8.5µm,表明变幅杆实现了纵扭谐振且振幅增强。

In order to obtain the longitudinal torsional resonance output under the condition of single longitudinal excitation ultrasonic vibration input,based on the sound wave propagation theory,the stepped horn adding a ring vibration transmitting rod with 6 multiple diagonal slits along the central axis was designed.Firstly,the theoretical design is carried out,then the finite element method is used for analysis and correction,finally,the size of the horn is determined.The results show that the theoretical design resonant frequency is 20 kHz,simulation analysis shows that the horn can realize longitudinal torsional resonance at 19457 Hz.The horn is made according to the simulation results.The resonance frequency of impedance test results is 19884 Hz,it has little error with theoretical value and simulation value.The 5µm loading amplitude at the input of the horn,test any point on the section circumference of the output end,its tangential and longitudinal amplitudes are 12.7µm and 8.5µm,which shows that the horn realizes the longitudinal torsional resonance output and the amplitude is strengthened.