摘要
简要介绍了涡轮分子泵的结构及其工作原理,主要对涡轮分子泵中关于冷却技术的工程实例做了相应的改进、分析,通过对冷却技术的方案设计改进,提高涡轮分子泵的冷却效果。
The structure of the turbo-molecular pump and its working principle are briefly introduced,and the main engineering examples on cooling technology in the turbo-molecular pump are improved and analysed accordingly,so as to improve the cooling effect of the turbo-molecular pump through the design improvement of the cooling technology scheme.
作者
姚松勤
常轩
常鑫
Yao Songqin;Chang Xuan;Chang Xin(Jiangsu Center for Patent Examination and Collaboration,State Intellectual Property Office,Suzhou Jiangsu 215000;Hangzhou Huli Automation Co.,Ltd.,Hangzhou Zhejiang 310018)
出处
《现代工业经济和信息化》
2022年第7期263-264,267,共3页
Modern Industrial Economy and Informationization
关键词
涡轮分子泵
冷却
散热
turbo-molecular pump
cooling
heat dissipation
