基于驻极体的低功耗非接触式电压测量技术

Low⁃power Non⁃contact Voltage Measurement Technology Based on Electret

针对低功耗、高性能非接触式电压测量的需求,提出一种基于驻极体电容结构的非接触式电压测量技术。驻极体电容结构由正面蒸发有金属导电薄膜的驻极体薄膜、绝缘衬圈和金属电极构成,通过理论分析和有限元仿真,得到传感器的输出响应关系,并通过搭建实验测试平台对传感器进行性能测试。测试结果表明,传感器输出响应特性与理论分析吻合,并具有较好的线性度和重复性,在施加600、800、1 000 Hz被测电压条件下,传感器的线性度分别达到6.1%、3.5%、2.7%,重复性分别达到9.67%、 5.93%、5.46%。

To meet the requirements of low power consumption,high performance of non⁃contact voltage measurement,a non⁃contact voltage measurement technology based on electret capacitor structure was proposed in this paper.The electret capacitor structure was composed of an electret film with a metal conductive film evaporated on the upper surface,an insulating liner and a metal electrode.The output response relationship of the sensor was obtained through theoretical analysis and finite element simula⁃tion,and the performance of the sensor was tested by building an experimental test platform.The test results show that the output response characteristics of the sensor are consistent with the theoretical analysis and have good linearity and repeatability.The lin⁃earity of the sensor reaches 6.1%,3.5%,and 2.7%and the repeatability reaches 9.67%,5.93%,and 5.46%under the conditions of applying 600 Hz,800 Hz,and 1000 Hz measured voltages,respectively.