质谱仪定量分析微量气体D_(2)的校准因子研究

Study on the Calibration Factor in Quantitative Analysis of Trace Gases D_(2)by Mass Spectrometer

通过在质谱仪进气管路上安装的标定腔室与真空管路,实现了对与微球内气体含量相同范围的微量气体的获取。对质谱仪定量分析微量气体时的精密度及被测量氘气的压力对D_(2)校准因子的影响进行了研究。结果表明:该四极质谱仪的精密度较高,不同压力下10次重复测量实验数据的相对标准偏差均小于0.004;校准后的一个月内质谱仪具有较高稳定性,其定量分析误差低于1%,准确度较高;D_(2)和Ar的浓度校准因子在一年内的变化不超过3%,而D_(2)的压力校准因子在一年内的变化超过8%;D_(2)的压力校准因子η与被测量氘气的压力P_(1)成反比,且η与log P_(1)存在较好的线性关系,这种线性关系在半年内具有较高的稳定性。

Through the calibration chamber and vacuum tube installed on the intake pipe of the mass spectrometer,the trace gas with the same content range as the gas in microsphere can be obtained.The precision of quantitative analysis of trace gases by mass spectrometer and the effect of measured deuterium pressure on the calibration factor of D_(2) were studied.The results show that the precision of the quadrupole mass spectrometer is high,and the relative standard deviation of the 10 repeated measurements under different pressures is less than 0.004.The mass spectrometer has a high stability within one month after calibration,and it has a high accuracy with the quantitative analysis error is less than 1%.The concentration calibration factors for D_(2) and Ar varied no more than 3%with in one year,while the pressure calibration factors for D_(2) varied more than 8%within one year.The pressure calibration factorηof D_(2) is inversely proportional to the pressure P_(1) of the measured deuterium gas,and there is a good linear relationship betweenηand log P_(1),which has a high stability in half a year.