微波等离子体化学气相沉积法合成高导热金刚石材料及器件应用进展

Recent Development on High Thermal Conductivity Diamond Synthesized by Microwave Plasma Chemical Vapor Deposition and Its Devices Applications

随着第3代半导体的应用,电子器件向高功率、小型化发展,由此带来的“热”问题逐渐凸显,金刚石由于其超高的热导率及稳定的性质,被认为是最优的散热材料之一。简要介绍了微波等离子体化学气相沉积装备的原理及发展历程,对比分析了不同种类生长设备的差异,对单晶、多晶及纳米晶金刚石在器件散热应用中的现状进行总结,结合第3代半导体总结了金刚石增强散热产业化过程中将面临的性能与尺寸方面的瓶颈问题及金刚石材料“大、纯、快”的发展方向,并对散热应用的未来研究方向做出展望。

In the application of the third-generation semiconductors, the power density of electronic devices increases and the size is miniaturization. A problem of high temperature becomes more prominent. Diamond is one of the optimum heat dissipation materials because of its ultra-high thermal conductivity and stable properties. In this review, the design principle and development process of different microwave plasma chemical vapor deposition equipment were introduced. Recent developments on different thermal applications of single crystal, polycrystalline and nanocrystal diamond were represented.Some challenges in the industrialization process combined with the 3rd-generation-semiconductors and the development direction of "larger, purer and faster" were summarized. In addition, the future research direction of diamond heat dissipation application was also prospected.