平面漏斗形微腔集成的高性能长波红外探测器

High-performance long wave infrared detector integrated with planar funnel-shaped plasmon microcavity

为实现量子阱红外光探测器件对垂直于阱结构的入射光吸收,减小模式体积,降低暗电流,提高比探测率D^(*),提高红外光探测器件性能,以10.55μm长波红外光为例,利用等离激元微腔与量子阱材料结合,形成F-P共振,增加GaAs/AlGaAs量子阱层的吸收率和器件的响应率。设计了平面漏斗形等离激元微腔集成的量子阱红外探测器(quantum well infrared photodetector,QWIP),使用基于有限元数值仿真方法对其进行分析。结果表明:平面漏斗形等离激元微腔集成的QWIP具有较小的光子模式体积和较高的局域场强,光吸收率维持在81%~89%的情况下,可以使探测材料体积减小38%~50%,获得的D^(*)比一般等离激元微腔集成的QWIP增大10%~15%。

In order to realize the absorption of the incident light perpendicular to the well structure by the quantum well infrared light detector,decrease the mode volume,reduce the dark current,improve the specific detection rate D^(*)and improve the performance of the infrared detector,10.55μm long-wave infrared light was taken as an example,and the plasmon microcavities were combined with quantum well material to form F-P resonance,which increases the absorption rate of GaAs/AlGaAs quantum wel layer and the response rate of the device.A planar funnel-shaped plasmon microcavity integrated quantum well infrared photodetector(QWIP)was designed and analyzed by finite element numerica simulation method.The results show that the QWIP integrated by planar funnel-shaped plasmon microcavity has smaller photon mode volume and higher local field intensity.When the optica absorptivity is maintained at 81%-89%,the volume of the detection material can be reduced by 38%-50%,and the obtained D*is 10%-15%larger than that of the QWIP integrated by general plasmon microcavity.