耐高温压力—振动复合传感器设计与仿真

Design and simulation of high temperature resistant pressure-vibration composite sensor

针对高温环境受限空间内压力及振动参数测量的实际需求,设计了一种基于陶瓷共烧工艺的压力—振动复合传感器,将压力、加速度参数转换为电容值实现测量。通过MATLAB软件对复合敏感结构参数进行仿真分析并确定结构尺寸,利用Ansys Workbench对复合敏感结构的静态力学、模态、谐响应及热力学参数进行仿真分析。结果表明:设计的传感器在0~0.5 MPa压力和0~25 g加速度载荷下能够正常工作;结构的模态分析一阶频率为701.44 Hz,且与谐响应分析结果基本一致;1200℃下压力灵敏度为2.3 pF/MPa,振动灵敏度为1.188 pF/g。

Aiming at the actual demand for pressure and vibration parameter measurement in confined space in high temperature environment, a pressure-vibration composite sensor based on ceramic co-firing process is designed.The pressure and acceleration parameters are converted into capacitance values for measurement.The complex sensitive structural parameters are simulated by MATLAB software and the structural size is determined.The static mechanics, modal, harmonic response and thermodynamic parameters of the sensor are simulated by Ansys Workbench.The results show that the designed sensor can work normally under 0~0.5 MPa pressure and 0~25 gacceleration load.The first-order frequency of the modal analysis is 701.44 Hz, which is basically consistent with the result of harmonic response analysis.At 1 200 ℃,the pressure sensitivity is 2.3 pF/MPa, and the vibration sensitivity is 1.188 pF/g.