铌酸锂单晶悬臂梁MEMS振动传感器的性能

Performances of MEMS Vibration Sensor Based on LiNbO3 Single-Crystal Cantilever-Beam

研究了基于铌酸锂压电单晶薄膜悬臂梁的微电子机械系统(MEMS)振动传感器的结构设计和加工工艺,并在宽频带和宽温度范围条件下对传感器进行了输出性能测试。结果表明,所制备的传感器固有频率接近于设计的目标频率;输出电荷呈正弦波形且其振幅随着振动加载加速度的幅值线性增长;当加载加速度为10g、频率为20~2200 Hz时,传感器的输出电荷比较平稳;传感器在70℃时的平均输出电荷较常温条件下的提升了19.6%;在-40℃时平均输出电荷虽下降了18%,但仍保持良好的电荷输出水平,体现了该振动传感器的鲁棒性。所研究开发的MEMS振动传感器制备工艺简单、输出特性高,在高频微振动监测方面具有较好的应用前景。

The structural design and processing technologies of micro-electromechanical system(MEMS)vibration sensor based on lithium niobate piezoelectric single-crystal thin-film cantilever-beams were studied,and the output performance of the sensor was tested under wide-band frequency and wide temperature range.The results show that the intrinsic frequency of the prepared sensor is close to the designed target frequency.The output charge is sinusoidal and its amplitude increases linearly with amplitude of the loaded vibration acceleration.When the acceleration is 10g and frequency is in the range of 20-2200 Hz,the output charge of the sensor is relatively stable.The average output charge of the sensor at 70℃is improved by 19.6%compared with that at room temperature.The average output charge is reduced by 18%at-40℃,but it remains good output level,indicating the robustness of the vibration sensor.The developed MEMS vibration sensor has simple fabrication process and high output performance,and has a good application prospect in monitoring of high-frequency micro vibration.