摘要
针对MEMS微镜动力学试验周期长、成本高的问题,通过Solidworks软件建立MEMS微镜几何模型,通过Hypermesh软件建立有限元模型。针对微镜镀层材料参数、厚度难以测量,以及微镜动力学特性受镀层加工工艺影响的问题,用元素型模型修正方法对模型进行修正,修正后,模型特征频率及振型与试验结果基本一致,表明通过元素型模型修正方法可以实现微镜模型的有效修正,修正后的模型动力学分析结果与实验接近。
In order to solve the problems of long period and high cost of MEMS micromirror dynamics test,the geometric model of MEMS micromirror is established by Solidworks and the finite element model is established by Hypermeshin.In view of the difficult to calculate the material parameters and thickness of MEMS micromirror coating,while the dynamic characteristics of micromirror are affected by the processing technology,the elemental model modification method is used to modify the model.The eigenfrequencies and vibration patterns of the modified model are basically consistent with the experimental results.It shows that the modification method can complete the model modification work effectively and the modification result is more accurate.The dynamic analysis results of the modified model are close to the experimental results.
作者
沈婧怡
丁晓红
张横
Shen Jingyi;Ding Xiaohong;Zhang Heng(School of Mechanical Engineering,University of Shanghai for Science and Technology,Shanghai 200093,China)
出处
《计算机时代》
2022年第9期105-107,114,共4页
Computer Era
