FMCS系统在FAB厂房中的应用

Application of FMCS System in FAB Plant

结合芯片制造的主要工艺流程和FAB厂房的特点,主要介绍了厂务监控系统FMCS系统的结构及优点,并就FMCS系统在FAB厂房的应用给出工程实例,为进行FAB厂房自动化控制规划提供了新方案。

Combined with the main process flow of chip manufacturing and the characteristics of Fab plant,this paper mainly introduces the structure and advantages of FMCS system,and gives an engineering example of the application of FMCS system in fab plant,which provides a new scheme for engineers and technicians in the automatic control planning of Fab plant.