多晶硅还原生产常见问题及控制对策分析

Analysis of Common Problems and Control Countermeasures in Polysilicon Reduction Production

讨论多晶硅还原生产过程中比较常见的一些问题,并针对这些问题总结针对性控制对策。首先介绍多晶硅还原生产工艺,了解还原生产原理以及基本流程。其次,针对多晶硅还原生产过程,提出九点比较常见的问题,并分别从硅芯和沉积硅之间黏合度、硅油的产生、大量无定形硅、倒棒现象、硅棒内氧化夹层、裂纹、高温条件下还原炉水管的震动、电压击穿导致的横梁和硅芯亮点、爆米花现象九个维度,总结控制对策,切实提高多晶硅还原生产效率与质量,旨在为今后光伏产业多晶硅还原生产工艺的改善与创新积累经验。

This paper discusses some common problems in the process of polysilicon reduction production,and summarizes targeted control countermeasures for these problems.First of all,it introduces the polycrystalline silicon reduction production process,and the reduction production principle and basic process.Secondly,for the production process of polysilicon reduction,nine common problems are put forward,and the control countermeasures are summarized from the following nine dimensions:the adhesion between silicon core and deposited silicon,the generation of silicon oil,a large amount of amorphous silicon,rod pouring phenomenon,oxidation interlayer in silicon rod,cracks,vibration of reduction furnace water pipe under high temperature,bright spots of beam and silicon core caused by voltage breakdown,and popcorn phenomenon,to effectively improve the production efficiency and quality of polysilicon reduction,and accumulate experience for the improvement and innovation of polysilicon reduction production process in the photovoltaic industry in the future.