摘要
针对半导体脆硬材料的切割加工成为多线切割设备发展的突出因素,通过与传统多线切割设备轴系比对分析,设计了适合碳化硅等脆硬材料切割加工设备轴系的油气润滑方式。通过实验比对得出使用油气润滑提升了多线切割设备的工艺优越性及精密性。
In accordance with semiconductor hard-brittle materials cutting to be becoming the main factor of multiwire sawing equipment development,analyzed by comparing with the structure of traditional spindle system components of multiwire sawing equipment,designed the spindle system based on merits of oil-air lubrication.With the compared experimental data,the precision and merits of multiwire sawing equipment are improved by using oil-air lubrication spindles.
作者
周建军
杨晓静
ZHOU Jianjun;YANG Xiaojing(The 45thResearch institute of CETC,Beijing 100176,China)
出处
《电子工业专用设备》
2022年第3期43-47,共5页
Equipment for Electronic Products Manufacturing
关键词
油气润滑
脆硬材料
多线切割
Oil-air lubrication
Hard-brittle materials
Multiwire sawing
