喷雾涂胶机旋转主轴动态特性研究

Study on Dynamic Characteristic for Rotating Spindle of Spray Coater

旋转主轴作为喷雾涂胶机的关键部件,其性能的优劣直接影响着光刻胶的喷涂质量。根据工艺要求提出了喷雾涂胶机旋转主轴的主要技术指标,建立了旋转主轴的三维模型,利用有限元软件ANSYS对旋转主轴进行了动态特性分析,验证了结构设计的合理性,为旋转主轴的开发设计提供了理论基础。

As the crucial unit of spray coater,the performance of rotating spindle has a direct impact on the spray quality of photoresist.The main technical specifications for rotating spindle of spray coater are put forward according to process requirements,the 3D model of rotating spindle is built,the dynamic characteristic of rotating spindle is analyzed using FEA software ANSYS,these results could verify the rationality of the structure design and provide theoretical foundation for the design of the rotating spindle.