固态电解质Li_(1.3)Al_(0.3)Ti_(1.7)(PO_(4))_(3)薄膜的溅射制备及其性能研究

Preparation and properties study of magnetron sputtered Li_(1.3)Al_(0.3)Ti_(1.7)(PO_(4))_(3) solid-state electrolyte thin film

通过射频磁控溅射制备Li_(1.3)Al_(0.3)Ti_(1.7)(PO_(4))_(3)(LATP)薄膜.X-射线衍射表征表明沉积的LATP薄膜为非晶态.改变溅射功率和氩气气压,发现在较大溅射功率(200 W)和较低气压(0.3 Pa)下制备的LATP薄膜具有较高的锂离子电导率,达到1.16×10^(-4)S/cm.将该优化条件下制备的LATP薄膜组装成Cu/LiCoO_(2)/LATP/LiCoO_(2)/Cu全固态薄膜对称电池,在7.8μA/cm^(2)电流密度下循环700 h,极化电压依然稳定.以上结果显示LATP薄膜有望在固态薄膜锂离子电池中得到广泛应用.

Li_(1.3)Al_(0.3)Ti_(1.7)(PO_(4))_(3)(LATP)thin film was prepared with radio frequency magnetron sputtering.The deposited LATP thin films were amorphous based on X-ray diffraction characterization.When varying the sputtering power and the argon gas pressure,it was found that when prepared under a higher sputtering power of 200 W and a lower gas pressure of 0.3 Pa,the LATP thin film had the highest lithium ion conductivity of 1.16×10^(-4)S/cm.The LATP thin film prepared under this optimized condition was assembled into a Cu/LiCoO_(2)/LATP/LiCoO_(2)/Cu all-solid-state thin-film symmetric battery.The polarization voltage was observed to be stable after cycling for 700 h at a current density of 7.8μA/cm^(2).The above results indicate that the LATP thin film is expected to be widely used as an electrolyte layer in solid-state thin-film lithium-ion batteries.