一种增强型的SOLR校准方法

An Enhanced SOLR Calibration Method

提出了一种增强型的在片SOLR校准方法(eSOLR),结合无需定义的直通传输线标准,2对对称的反射标准(开路标准、短路标准)和1对准确定义的负载标准,实现微波毫米波频段的校准测试。详细给出了8项误差模型的求解过程,同时采用校准比较算法对商用校准方法和eSOLR进行了验证。实验结果表明,eSOLR优于现有的商用SOLT、LRRM校准方法。0.2~110 GHz陶瓷衬底的无源失配衰减器验证件测量结果表明,新方法S测量结果更加连续,测量结果与多线TRL更为吻合。

An enhanced SOLR(eSOLR) calibration method for solving the 8-term errors model in an on-wafer test system is introduced. The proposed new method requires one undefined Thru, two pairs of undefined symmetrical Reflects(Open-Open and Short-Short) and a pair of known Loads. 8-term error terms are derived in detail. Calibration comparison method was carried out between commercial calibration methods and eSOLR. The result showed that eSOLR was more accuracy than SOLT and LRRM. The calibration method has been tested on a mismatched attenuator for the frequency range between 0.2 GHz and 110 GHz. Compared with the existing calibration methods, the new method shows the attenuator’s Sis more consecutive and Smore closer to the Multiline TRL.