基于晶体相场法研究缺口形貌对微裂纹扩展连通的影响

Study on the Effect of Notch Morphology on the Propagation and Connectivity of Microcracks by Crystal Phase Field Method

采用晶体相场方法研究金属微互连结构界面微裂纹在两种不同初始缺口区域形貌情况下的扩展连通过程。研究表明:微裂纹在两种初始缺口区域形貌下呈“树枝状”扩展;扩展过程中伴随着二次微裂纹和三次微裂纹的生长;微裂纹扩展面积占总面积的百分比随着演化时间的增加逐渐增大,主裂纹扩展面积占总扩展面积的百分比随着演化时间的增加而增大;初始缺口区域形貌为正方形的微裂纹扩展面积占总面积的百分比和主裂纹扩展面积占总扩展面积的百分比均高于初始缺口区域形貌为矩形的微裂纹扩展;初始缺口区域形貌的改变并不影响原子间距和原子波动周期。

The crystal phase field method was used to study the propagation and connectivity of microcracks at the interface of metal micro interconnection structures under two different initial notch region morphologies.The results show that the microcracks propagate in the form of"dendrite"under the two initial notches.The propagation process is accompanied by the growth of secondary microcracks and tertiary microcracks.The percentage of microcrack propagation area in the total area gradually increases with the increase of evolution time.The percentage of the main crack propagation area to the total propagation area increases with the increase of the evolution time.The percentage of the microcrack propagation area in the total area and the percentage of the main crack propagation area in the total propagation area in the initial notch region are higher than that in the initial notch region.The change of the morphology of the initial notch region does not affect the atomic spacing and the atomic wave period.