一种基于RF MEMS开关的四端口电子校准件设计

Design of a Four Port Electronic Calibrator Based on RF MEMS Switch

针对射频多端口器件微波测试需求,基于SOLT校准原理设计了一种工作频率在DC~12 GHz范围内、基于RF MEMS开关的四端口电子校准件。数值仿真结果表明,在短路状态下,器件的回波损耗小于0.15 dB;在直通状态下,器件的插入损耗小于0.5 dB,端口之间的隔离度大于20 dB;在开路状态下,器件的回波损耗小于0.3 dB,端口之间的隔离度大于25 dB;同时采用微表面加工工艺,利用磁控溅射工艺对负载电阻进行了制备,其测试结果约为50Ω,符合设计要求。设计的基于RF MEMS开关的四端口校准件,具有射频性能好、体积小、易于集成等优点,能够满足X波段微波多端口器件在片测试的应用需求。

According to the microwave test requirements of RF multi-port devices, a four port electronic calibrator based on RF MEMS switch with a working frequency in the range of DC~12 GHz was designed based on SOLT calibration principle. The numerical simulation results showed that the return loss of the device was less than 0.15 dB in the short circuit state. In the through state, the insertion loss of the device was less than 0.5 dB, and the isolation between ports was greater than 20 dB. In the open circuit state, the return loss of the device was less than 0.3 dB, and the isolation between ports was greater than 25 dB. At the same time, the load resistance was prepared by micro surface machining process and magnetron sputtering process. The tested resistance was about 50 Ω, which met the design requirements. The designed four port calibration device based on RF MEMS switch had the advantages of good RF performance, small volume and easy to integrate. It could meet the application requirements of X-band microwave multi-port devices in on-chip testing.