面向SOI波导-单模光纤耦合的硅微透镜设计

Design of silicon microlens for coupling between SOI waveguide and single-mode fiber

硅光集成的优势在高速光电子领域不断凸显,被广泛应用于各种通信场景中。在硅基集成技术发展过程中,其面临的一个典型技术难点是硅波导与单模光纤的耦合。本文设计了波导边缘集成的硅微透镜结构,经BPM法(Beam Propagation Method)计算验证该结构可实现3μm厚SOI波导与纤芯直径8.6μm单模光纤90%的近场耦合效率,具备高集成度、高耦合效率、多场景适用等优点。

The advantages of silicon photonic integration continue to be highlighted in the field of high-speed optoelectronics, which are widely applied in various communication scenarios.In the development of silicon-based photonic integration technology, a typical technical difficulty is the coupling of silicon waveguides and single-mode optical fibers.In this paper, a silicon-microlens structure integrated at the edge of the silicon-on-insulator(SOI)waveguide is designed.The result of BPM(Beam Propagation Method)numerical simulation shows that the designed micro-lens structure can achieve 90 % near-field coupling efficiency between a 3 μm-thick SOI waveguide and a 8.6 μm core-diameter single-mode fiber, with the advantages of high integration, high coupling efficiency, and multi-scene applicability.