先进电子铝箔微观腐蚀形貌的对比分析

Comparative analysis of microscopic corrosion morphology of advanced electronic aluminum foil

针对国产高压腐蚀箔容量偏低、一致性差以及各项性能参数离散性大等问题,开展了先进电子铝箔微观腐蚀形貌的对比研究。首先通过电解抛光处理,使高压腐蚀箔显示出真实有效的腐蚀形貌。其次借助计算机图像模拟分析程序,对国内外不同厂家高压腐蚀箔形貌的扫描电子显微镜(SEM)照片进行测试分析,得到相应的腐蚀蚀孔特征参数数据库。通过参数对比可以得到B样品(日本KDK公司生产)的综合性能最佳:隧道孔深50μm,发孔密度较小,单孔平均尺寸1.17μm,折弯55次,520 V化成电压下阳极箔比容量最高达到0.877μF/cm^(2)。本文通过对比不同厂家高压腐蚀箔的微观形貌,找出形貌特征参数与性能之间的关系,为深入研究高性能铝箔蚀孔生长控制技术提供了参考依据。

Aiming at the problems of low capacity,poor consistency and large dispersion of various performance parameters of domestic high-pressure corrosion foil,a comparative study on the micro corrosion morphology of advanced electronic aluminum foil was carried out.First,the real and effective corrosion morphology of the high-pressure corrosion foil was achieved through electropolishing treatment.Secondly,the scanning electron microscope(SEM) photos of high-pressure corrosion foils from different manufacturers at home and abroad were analyzed with the help of computer image simulation analysis program,and the corresponding corrosion pitting characteristic parameter database was obtained.Through comparison of the parameters,it is found that the comprehensive performance of sample B(produced by KDK company in Japan) is the best.The tunnel hole depth is 50 μm.The density of holes is smaller with the average hole size of 1.17 μm.After bending for 55 times,the specific capacity of anode foil reaches 0.877 μF/cm^(2) at 520 V formation voltage.By comparing the micro-morphology of high-pressure corrosion foils from different manufacturers,the relationship between the morphology characteristic parameters and the performance of the foil is addressed,which provides a reference for the study of high-performance aluminum foil pitting growth control technology.