摘要
针对现有的TiNbN硬质膜的制备技术、晶体结构、硬度、结合力、耐磨性等组织性能方面进行了分析概述。针对TiAlNbN硬质膜的硬度、耐磨性、抗热震性能等力学性能进行了总结,并对TiAlNbN硬质膜的发展进行了展望。
The preparation technology and microstructure properties like crystal structure,hardness,adhesion and wear resistance of the existing TiNbN hard films were analyzed and overviewed in this paper.Besides,the mechanical properties such as hardness,wear resistance and thermal shock resistance of TiAlNbN hard films were summarized.Finally,the development of TiAlNbN hard film was prospected.
作者
苏富斌
张钧
王晓阳
钱春晖
陈磊
SU Fu-bin;ZHANG Jun;WANG Xiao-yang;QIAN Chun-hui;CHEN Lei(Key Laboratory of Research and Application of Multiple Hard Films,College of Mechanical Engineering,Shenyang University,Shenyang 110044,China)
出处
《材料保护》
CAS
CSCD
2022年第9期134-140,166,共8页
Materials Protection
基金
辽宁省科技厅博士启动计划项目(2021⁃BS⁃276)资助。
