铝纳米颗粒增强氧化镓日盲光电探测器性能研究

The performance of Al plasmon enhanced β-Ga_(2)O_(3) solar-blind photodetector

基于金属纳米等离子体的局域表面等离激元效应(LSPR)能够增强局域电场强度,并表现出优异的光捕获能力,可有效提升光电子器件的性能.本文结合时域有限差分法和磁控溅射技术,分别从理论和实验方面研究了金属Al纳米等离子体对β-Ga_(2)O_(3)日盲光电探测器光电特性的影响.研究发现,在254 nm日盲紫外光照射下,半径为30 nm的Al纳米等离子体可以产生LSPR效应.得益于Al等离子体的LSPR效应,β-Ga_(2)O_(3)日盲光电探测器的光谱响应度和探测率分别提升了4.7倍和6倍,器件暗电流降为原来的62.5%.本研究为Al纳米等离子体在日盲波段的应用提供了理论和实验基础,也为进一步提升日盲光电探测器的光电性能提供了新方法.

The surface plasmon effect based on metal nanoparticles can enhance the local electric field strength and exhibit excellent light trapping capabilities,which can effectively improve the performance of optoelectronic devices.In this study,combined with the Finite Difference Time Domain(FDTD)method and magnetron sputtering technology,the effects of metallic Al nanoparticles on the photoelectric characteristics ofβ-Ga_(2)O_(3)solar-blind photodetectors are studied theoretically and experimentally.The results show that Al nanoparticles with a radius of 30 nm can produce an LSPR effect under 254 nm solar-blind ultraviolet light.Due to the LSPR effect of Al NPs,the spectral responsivity and detectivity of theβ-Ga_(2)O_(3)solar-blind photodetector have been increased by 4.7 times and 6 times,respectively,and the dark current of the device has been reduced to 62.5%of the original value.This study provides a theoretical and experimental basis for the application of Al NPs in the solar-blind band,and provides a new method for further improving the performance of solar-blind photodetectors.