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Improvement of the spreading effect of atmospheric pressure microplasma jet treatment through shielding-gas-controlled focusing

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摘要 The spreading effect of atmospheric pressure microplasma jets(APμPJ)on the surface of materials will increase the etching area,and controlling the diameter of the jet can improve the precision of surface treatment.In this work,a two-dimensional axisymmetric simulation model is established to analyze the effect of nitrogen(N_(2))shielding gas on helium(He)from gas dynamics.In addition,by etching the polyethylene terephthalate fllm,the relationship between the etching effect and aerodynamic analysis is verifled.The simulation results are similar to the experimental results,indicating that N2 shielding gas has a focusing effect which is related to the N_(2)flow rate,distance difference between the inner and outer tubes,and outer tube nozzle diameter.It is hoped that the results of this work can provide a certain reference for the use of shielding gas to control the jet flow of APμPJ.
作者 吕栎 陈剑航 汪加豪 王圣泉 李蒙 涂德浴 时礼平 王涛 Li LV;Jianhang CHEN;Jiahao WANG;Shengquan WANG;Meng LI;Deyu TU;Liping SHI;Tao WANG(Anhui Province Engineering Laboratory of Intelligent Demolition Equipment,Maanshan 243032,People’s Republic of China;School of Mechanical Engineering,Anhui University of Technology,Maanshan 243032,People’s Republic of China;Anhui Province Key Laboratory of Special Heavy Load Robot,Anhui University of Technology,Maanshan 243032,People’s Republic of China;Key Laboratory of Green Fabrication and Surface Technology of Advanced Metal Materials,Ministry of Education,Anhui University of Technology,Maanshan 243032,People’s Republic of China)
出处 《Plasma Science and Technology》 SCIE EI CAS CSCD 2022年第9期85-97,共13页 等离子体科学和技术(英文版)
基金 supported by National Natural Science Foundation of China(No.51905002) Anhui Provincial Natural Science Foundation(Nos.2008085QE230,2108085ME174) Open Project of Key Laboratory of Green Fabrication and Surface Technology of Advanced Metal Materials(No.GFST2021KF06) Open Project of Anhui Province Key Laboratory of Special and Heavy Load Robot(No.TZJQRO03-2021) Open Project of Anhui Province Engineering Laboratory of Intelligent Demolition Equipment(No.APELIDE2021B001)。
关键词 microplasma jet nitrogen shielding gas focusing effect gas dynamic microplasma jet nitrogen shielding gas focusing effect gas dynamic
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