基于超表面的新型太赫兹功能器件研究

Research on New Type of Terahertz Functional Devices based on Metal Surface

太赫兹技术自被发现以来,凭借其自身独特优势,迅速引起了人们的广泛关注,其主要包括太赫兹源技术、太赫兹器件和太赫兹探测技术。其中,太赫兹器件与多个领域结合紧密,在生物医疗、半导体封装、无损检测、食品农产品、太赫兹通信材料表征等方面有广泛应用。超材料具有独特的结构优势,可以人为设计、选材,将超材料引入太赫兹器件使得太赫兹器件可以被人工设计成所需要的效果,从而为多个领域提供技术、器件支持。从太赫兹器件的构成、加工流程、应用、太赫兹器件对太赫兹波的调控原理以及当今存在的主要太赫兹技术等方面对太赫兹器件进行了研究,并对其发展前景做出了展望。

Terahertz(THz)technology has rapidly attracted extensive attention by virtue of its unique advantages since it was discovered,which mainly included terahertz source technology,terahertz devices and terahertz detection technology.Among of them,terahertz devices were closely combined with many fields and were widely used in biomedicine,semiconductor packaging,nondestructive testing,food and agricultural products,terahertz communication material characterization and so on.Metamaterials had unique structural advantages,which could be artificially designed and selected.Thorough introducing metamaterials into terahertz devices,terahertz devices can be artificially designed to the desired effect,so as to provide technical and device support for many fields.THz devices were researched in details from the aspects of THz device composition,processing flow,application,THz device regulation principle for THz wave and current main THz technology,and its prospect was presented.