多层结构设计对类石墨碳基薄膜摩擦学性能的影响

Effect of Multilayer Structure Design on Tribological Properties of GLC Films

采用直流磁控溅射法在15-5PH钢样片上制备Cr/GLC单层膜和具有6个交替结构的Cr/GLC多层膜。利用扫描电镜(SEM)、拉曼光谱仪(Raman)对薄膜结构进行表征;采用纳米压痕仪、划痕仪等测试其力学性能;利用MFT-5000多功能摩擦磨损试验机测试薄膜在大气及海水环境中的摩擦磨损性能,并分析其磨损机理。结果表明:多层结构设计提高了薄膜的致密度和石墨化程度,降低了内应力,Cr/GLC多层膜的膜基结合力、硬度及弹性模量均高于Cr/GLC单层膜。中、低载荷时,两种类石墨碳基薄膜的磨损形式以磨粒磨损为主,Cr/GLC多层膜在大气环境及海水环境下较Cr/GLC薄膜具有更好的摩擦学性能。高载荷下,Cr/GLC多层膜在大气环境下仍具有较好的摩擦学性能,但在海水环境下的耐磨性劣化。

Cr/GLC monolayer films and Cr/GLC multilayer films with modulation period 6 were prepared by DC magnetron sputtering on 15-5PH steel samples. Scanning electron microscope(SEM), Raman spectrometer(Raman) were used to analyze the microstructure of the films.The nanoindentation and scratching instruments were used to test their mechanical properties. MFT-5000 multifunctional tribological wear tester was used to test the friction and wear performance of the films in atmosphere and seawater environment, and their wear mechanism was analyzed. The results show that the multilayer structure design improves the density and graphitization degree of the films, and reduces the internal stress. The adhesion force, hardness and elastic modulus of Cr/GLC multilayer films are higher than that of Cr/GLC monolayer films.Under medium and lower loading conditions, the wear forms of the two types of graphite films are mainly abrasive wear, and the tribological properties of Cr/GLC multilayer films are superior to Cr/GLC films in atmospheric and seawater environments.Under higher load, Cr/GLC multilayer films still have better tribological properties than Cr/GLC monolayer films in atmospheric environment, but the wear resistance is degraded in seawater environment.