旋转磁场辅助激光加工微孔的机理及试验研究

Mechanism and Experimental Research of Magnetic Field Rotation Assisted Laser Machining of Micro-Holes

为了改善激光钻孔的几何形貌,提高其刻蚀深度和减小微孔锥度,以304不锈钢为试验材料,采用旋转磁场辅助激光钻孔的加工工艺,研究了在不同转速旋转磁场下,微孔刻蚀深度、表面喷溅、孔壁几何形貌和内壁氧含量的变化,探索了在有/无旋转磁场作用下,单脉冲能量对微孔锥度的影响。试验结果表明,随着旋转磁场转速的提升,微孔刻蚀深度增加,表面喷溅更加显著,氧含量降低,但过快的转速会使孔壁几何形貌变差。此外,旋转磁场的引入可以有效减小微孔锥度,且单脉冲能量越大,微孔锥度降低得越明显。

Objective With the advancement of science and technology in the aerospace sector,the micro-hole laser processing tools have become increasingly important.Compared to traditional machining and electric spark processing of micro-plates,laser drilling has high processing efficiency,high speed,low cost,and wide application range,and a lot of high sensitive holes can be processed.An ultrashort laser pulse has gradually become the preferred one for high-quality micro-hole processing due to its high processing accuracy,but the existing studies have found that an ultrashort pulse laser still has defects such as recast layers,micro-cracks,and slags,and at the same time,the processing efficiency is far less than that for a traditional long laser pulse.Magnetic field assisted laser drilling can further reduce the defects of ultrashort laser processing to improve the micro-hole morphology,increase the etching depth,and reduce the hole taper.In order to further improve the geometry for laser drilling,improve the etching depth,and reduce the hole taper,the 304 stainless steel is used as the test material and the magnetic field rotation assisted laser drilling and machining is adopted.Methods This paper discusses the mechanism and experimental study of magnetic field rotation assisted laser drilling of304 stainless steel.First,the effect of magnetic field rotation on the quality of microporous processing is studied.The variations of micro-hole etching depth,the surface spatter,the hole-wall geometry,and the oxygen content of inner wall are investigated under the action of different magnetic field rotation speeds.The microporous surface splatter and the innerwall morphology are observed by the scanning electron microscope.The inner-wall removal amount is described with surface splatter,and the inner-wall quality is described with inner wall smooth flatness.Then,the inner-wall oxygen content is measured by the energy spectrometer,and it can reflect the inner-wall slag and the recast layer of the micro-holes.The inner-wall regional scanning and line scanning are studied at different magnetic field rotation speeds,which can infer the variation of inner-wall oxygen content(inner-wall slag and recast layer)with magnetic field rotation.The micro-hole etching depth is measured by the ultra-depth-of-field microscope,the micro-hole etching depth is quantified,and the etching depths under different rotation speeds for 5 s and 10 s are compared.Finally,the effect of magnetic field rotation on the micro-hole taper is studied under different single pulse energies.It can be evaluated from the micro-hole inlet size,outlet size,and inner-wall taper.Results and Discussions After applying a rotating magnetic field,the Lorenz force generated by the rotating magnetic field accelerates the motion of the charged particles in plasma and simultaneously the molten metal has a certain agitation and splash,so the inner-wall melt distribution is more uniform and the removal uniformity of the through-hole is further improved(Fig.5).When the rotating magnetic field is applied,the surface splash is increased.The surface splatter is increased more significantly as the magnetic field rotation speed is increased to 250 r/min(Fig.6).The application of the rotating magnetic field can accelerate the flow of the inner-wall molten metal.Therefore the inner-wall morphologies of the recast layers are smoother,and it can also accelerate the discharge of the slags in the micro-hole inlet and outlet.The oxygen content reflects the residues of inner-wall slags,indicating that the microrhole slags are reduced after applying a rotating magnetic field(Fig.7).As the magnetic field rotation speed increases,the micro-hole etching depth also increases.When the magnetic field rotation speed is 350 r/min and the processing time is 10 s,the increase of etching depth reaches the maximum of 24.7μm(Figs.8,9,and 10).Compared those with and without a rotating magnetic field when the single pulse energy becomes large,the diameter of the micro-hole inlet under the rotating magnetic field is significantly reduced and the outlet diameter is slightly increased,so the micro-hole taper is reduced more significantly under a larger energy.When the single pulse energy of the laser is 85μJ,the micro-hole taper difference between the two processes is the largest,and the micro-hole taper under a rotating magnetic field is reduced by 1.17°compared with that by laser direct processing(Figs.11 and 12).Conclusions The variations of micro-hole etching depth,the surface spatter,the hole-wall geometry,and the inner-wall oxygen content are investigated under the action of magnetic fields with different rotation speeds.The effect of single pulse energy on the micro-hole taper is studied with and without the action of a rotating magnetic field.Experiments show that with the increase of magnetic field rotation speed,the micro-hole etching depth increases,the surface splashing becomes more pronounced,and the oxygen content further decreases.The introduction of a rotating magnetic field makes the geometric shape of the hole-wall smooth and can effectively reduce the micro-hole taper.The higher the energy of a single pulse,the more significant the decrease in micro-hole taper.