扫描热显微镜热导率表征与影响因素分析

Thermal Conductivity Characterization Based on Scanning Thermal Microscope and Influencing Factors Analysis

扫描热显微镜以其纳米级的空间和热分辨率被广泛用于材料表面形貌以及热物理性质的表征。本文以现有扫描热显微镜闭环模式为基础,探讨开环模式下进行材料热导率定量测量的理论模型以及实验方法。通过理论计算,分析讨论了近场辐射对于扫描热显微镜热探针与样品间的热传输通道的影响。通过实验验证了开环模式下进行热导率定量测量的可行性。

Scanning thermal microscope has been widely used to characterize the surface morphology and thermophysical properties of materials with its nanometer-level spatial and thermal resolution. Based on the existing closed-loop mode of scanning thermal microscope, this paper discusses theoretical models and experimental methods for quantitative measurement of material thermal conductivity based on open-loop mode. Through theoretical calculations, the influence of near-field radiation on the heat transfer channel between the thermal probe and the sample of the scanning thermal microscope is analyzed and discussed. Experiments are carried out to verify the feasibility of quantitative thermal conductivity measurement in open-loop mode.