小型化高密度可调控电感耦合等离子体发生器性能研究

Study on Performance of a Miniaturized High Density Inductively Coupled Plasma Generator

根据理论分析和磁场仿真结果设计并加工了一款用于黑障通信实验的电感耦合等离子体发生器,该装置能产生具有形状为半球形、厚度小于5 cm、等离子体密度为1×10^(18)m^(-3)量级等黑障典型等离子体鞘层特征的等离子体薄层。采用等离子体发射光谱诊断的方法,研究了等离子体发生器产生等离子体的电子激发温度和电子数密度,并分析了线圈功率对等离子体特性的影响规律,对等离子体发生器乃至对电小天线辐射调控系统的进一步优化有参考作用。

According to the theoretical analysis and magnetic field simulation results,an inductively coupled plasma generator for black barrier communication experiment is designed and fabricated.The device can produce a plasma thin layer with the typical characteristics of black barrier plasma sheath with a hemispherical shape,thickness less than 5 cm and plasma density of 1×10^(18)m^(-3).Using the method of plasma emission spectrum diagnosis,the electron excitation temperature and electron number density of the plasma produced by the plasma generator are studied,the influence law of coil power on the plasma characteristics is analyzed,and the mechanism is explored,which has a certain reference for the further optimization of the plasma generator and even the radiation control system of electrically small antenna.