NaCl助熔剂法合成钽酸锂及掺铁钽酸锂晶体

Synthesis of LiTaO_(3) and LiTaO_(3) crystals doped with Fe_(2)O_(3) by NaCl flux method

采用NaCl助熔剂法合成了钽酸锂及掺铁钽酸锂晶体,分别采用SEM、EDS-Mapping、XPS、XRD、Raman-Mapping、AFM和瞬态光电流测试系统等测试手段对所合成的晶体的微观形貌、元素及成分组成分布、物相组成、应力分布、表面粗糙度、瞬态光电流性能进行了一系列测试研究,测试结果表明所合成的钽酸锂及掺铁钽酸锂晶体元素和成分分布均匀,结晶程度非常高,可机械加工性能良好,抛光后的单晶晶片表面平整光滑,粗糙度小,皆具有良好的光电性能,所合成的钽酸锂晶体表面应力分布均匀,但掺铁钽酸锂晶体表面应力分布不太均匀,存在明显的应力分布集中的区域。

The synthesis of LiTaO_(3) and LiTaO_(3) crystals doped with Fe_(2)O_(3) was achieved by NaCl flux method.The microstructure,elemental and composition distribution,stress distribution,roughness and transient photocurrents of LiTaO_(3)were characterized by SEM,EDS-Mapping,XPS,Raman-Mapping,AFM and transient photocurrent test.The results showed the distribution of elements and components are uniform,moreover,the thermal stability and machinability are very good.The polished crystal surface is dense and smooth,with small roughness and good photoelectric properties.The stress distribution is uniform for LiTaO_(3) crystal,but the stress distribution is not uniform for LiTaO_(3) crystal doped with Fe_(2)O_(3),and an obvious stress concentration region was observed.