超声波清洗液控制系统研究

Study on Fluid Control System in Ultrasonic Cleaning

介绍了一种超声波清洗液系统的控制原理与方法。该控制系统一般用于晶圆清洗设备,通过软件方法实现对各种功能的控制,保障了晶圆在超声波清洗过程中的清洁效果,同时也提升了设备的安全和稳定性。

The research conclusion of a fluid control system in ultrasonic cleaning is introduced.The control system is generally used in wafer cleaning equipment.It realizes the control of various functions through software method,which not only ensures the processing effect of wafer in the process of ultrasonic cleaning,but also improves the safety and stability of the equipment.