摘要
基于自主发明的升温模式工作氢气敏感探头,开发了具有实时反馈温度控制、桥式数据处理和显示功能的高选择性氢气传感器微系统。控制与读出系统基于STM32F103C8T6硬件平台搭建,围绕桥式测量需要设计了外围电路,开发了双路比例—积分—微分(PID)温度控制算法,集成了兼具温度检测和加热两种功能的薄膜铂(Pt)电阻,能够使探头工作温度保持在最佳温度范围内。系统上电后响应迅速,读出误差小且信号稳定。
Based on the self-invented hydrogen sensitive probe working in the heating mode, a highly selective hydrogen sensor micro system with real-time feedback temperature control, bridge data processing and display functions has been developed.The control and readout system are based on the STM32 F103 C8 T6 hardware platform.The peripheral circuit is designed around the bridge measurement needs, and the dual-channel PID temperature control algorithm is developed.It integrates the thin film Pt resistor with both temperature detection and heating functions, which is able to keep the probe working temperature within the optimal temperature range.After the system is powered on, the response is fast, the readout error is small and the signal is stable.
作者
刘卓元
宋旭彤
孙云娜
丁桂甫
LIU Zhuoyuan;SONG Xutong;SUN Yunna;DING Guifu(Science and Technology on Micro/Nano Fabrication Labo atory,Shanghai Jiao Tong University,Shanghai 200240,China)
出处
《传感器与微系统》
CSCD
北大核心
2022年第10期67-70,共4页
Transducer and Microsystem Technologies