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光学显微镜畸变测量方法研究 被引量:2

Study on measuring distortion method of optical microscope
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摘要 为有效解决光学显微镜畸变溯源无测试方法、无测量标准等问题,研究一种光学显微镜畸变测量系统。系统由两种规格“米字形”高等别线纹尺、数字照相机、相机固定装置、图像传输软件、测量软件组成。对“米字形”线纹尺相对畸变进行溯源,用光学显微镜畸变测量系统对光学显微镜的图像采集测量系统、金相显微镜的相对畸变进行测试研究。结果表明光学显微镜畸变测量系统技术指标远优于技术要求,可以作为光学显微镜畸变测量标准器使用,可有效解决光学显微镜溯源问题。 In order to effectively solve the problem of no test method and no measurement standard for optical microscope distortion traceability,a distortion measurement system for optical microscope is studied.The system is composed of two specifications of“米-shaped”high-grade line ruler,digital camera,camera fixing device,image transmission software and measurement software.The relative distortion of the“米-shaped”line ruler is traced,and the relative distortion of the image acquisition and measurement system of the optical microscope and the metallographic microscope is measured and studied with the distortion measurement system of the optical microscope.The results show that the technical specifications of the optical microscope distortion measurement system are far better than the technical requirements,and it can be used as a standard for optical microscope distortion measurement,which effectively solves the problem of optical microscope traceability.
作者 房永强 张曙香 余泽利 白新房 毕革平 马晓晨 余森 FANG Yongqiang;ZHANG Shuxiang;YU Zeli;BAI Xinfang;BI Geping;MA Xiaochen;YU Sen(Xi’an Hantang Analysis and Testing Co.,Ltd.,Xi’an 710201,China;Northwest Institute for Non-ferrous Metal Research,Xi’an 710016,China)
出处 《中国测试》 CAS 北大核心 2022年第9期41-45,共5页 China Measurement & Test
基金 国家自然基金面上项目(32071327) 陕西省创新能力支撑计划(2021PT-024)。
关键词 计量学 光学显微镜 畸变 测量方法 metrology optical microscope distortion measuring method
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