压电材料驱动的微型回热式制冷机研究进展

Advances in piezoelectric-driven miniature regenerative refrigerators

在介绍现有高集成度电子器件高效散热需求的基础上,分析了压电材料驱动的回热式制冷机的结构形式、工作性能与技术特点,重点总结了微型斯特林制冷机的研究进展。相比于传统电子器件的集中式散热冷却,采用压电薄膜驱动的微型斯特林制冷机可实现较高的制冷密度,并具有环境友好、可靠性高和制冷温区广等优点,使得该技术在电子器件中芯片的精准高效冷却领域具有较大潜力,但需要从高频微尺度交变流动高效传热机理,微结构回热器优化和超高频大压比驱动源等方面进行更深入的研究。

For heat dissipation in integrated electronic devices,the structures,performance and technical characteristics of piezoelectric driven miniature regenerative refrigerators were analyzed,and the advances of miniature Stirling refrigerators were focused.Compared with traditional centralized cooling methods in electronic devices,the piezoelectric driven miniature Stirling refrigerator has the advantages of environmental friendliness,high feasibility and wide range of cooling temperature to achieve a high density of cooling power,making it a promising technology for accurate and efficient cooling on chips of electronic devices.However,heat transfer of oscillating flows in microstructure with high frequency,optimization of micro-regenerator for efficient cooling and selection of piezoelectric material in driving source need to be further investigated.