三氟甲烷的合成与高纯三氟甲烷的提纯工艺研究进展

Progress in Synthesis of Trifluoromethane and Purification of High Purity Trifluoromethane

高纯三氟甲烷(CHF_(3))的合成与提纯研究对微电子行业的发展意义深远。本文介绍了CHF_(3)的合成方法,如电解法、氯仿直接氟化法、氯仿催化氟化法、二氟一氯甲烷催化氟化法、二氟一氯甲烷催化歧化法等,并分析了各方法的优缺点;综述了高纯CHF_(3)的提纯方法,包括精馏法、溶剂吸收法、吸附法等,单纯一种提纯方法很难使CHF_(3)产品达到电子级标准,通过多种提纯方法的联用可制备符合要求的高纯CHF_(3)。本文通过对CHF_(3)的合成方法和高纯CHF_(3)的提纯工艺进行分类分析,对高纯CHF_(3)的生产提供参考,具有一定的实用价值和指导意义。

The research on the synthesis and purification of high purity trifluoromethane(CHF_(3))is highly significance to the development of microelectronics industry.In this paper,the synthetic methods of CHF_(3) is introduced,including electrolysis,direct fluorination of chloroform,catalytic fluorination of chloroform,catalytic fluorination of difluoromonochloromethane and catalytic disproportionation of difluoromonochloromethane.The advantage and disadvantage of each method is also analyzed.The purification methods of high purity CHF_(3),including distillation,solvent absorption and adsorption,are reviewed.It is difficult to obtain CHF_(3) products meeting the electronic standard by a single purification method,whereas high purity CHF_(3) can be prepared by the combination of various purification methods.In this paper,the synthesis method of CHF_(3) and the purification process of high purity CHF_(3) are classified and analyzed,which provides a valuable reference for the production of high purity CHF_(3).