摘要
不同形貌ZnO纳米材料的合成对高性能气敏传感器的开发具有重要意义。采用微波辅助法合成了ZnO纳米微球和纳米棒,通过X射线衍射仪(XRD)、场发射扫描电子显微镜(FESEM)和紫外-可见分光光度计(UV-Vis)分别对材料的结构、形貌和光学性能进行表征,研究了两种形貌ZnO纳米材料的气敏性能。结果表明:ZnO纳米微球与ZnO纳米棒相比表现出良好的气敏性能,在370℃下对体积分数为100×10^(-6)的三乙胺灵敏度高达110.4,响应和恢复时间分别为18 s和2 s,检测限低至0.1×10^(-6),在长期的循环测试中ZnO纳米微球传感器可以保持较高的响应值、良好的稳定性和重复性。
The synthesis of ZnO nanomaterials with different morphologies is of great importance for the development of high-performance gas sensors.ZnO nano-microspheres and nanorods were synthesized by the microwave-assisted method and characterized via X-ray diffractometer(XRD),field emission scanning electron microscopy(FESEM)and UV-Vis spectrophotometer(UV-Vis)for their structures,morphologies and optical properties,respectively.The gas sensing performances of ZnO nanomaterials with two morphologies were investigated.The results show that compared with ZnO nanorods,ZnO nano-microspheres exhibit better gas sensing performance with high response of 110.4 to triethylamine with a volume fraction of 100×10^(-6)at 370℃.Response and recovery time are 18 s and 2 s,respectively,and the detection limit is as low as 0.1×10^(-6).The ZnO nano-microspheres sensor can maintain a high response value,good stability and reproducibility in a long-term cycling test.
作者
桂阳海
涂远生
田宽
郭会师
吴锦涛
赵帅帅
黄海
Gui Yanghai;Tu Yuansheng;Tian Kuan;Guo HuishiWu Jintao;Zhao Shuaishuai;Huang Hai(College of Materials and Chemical Engineering,Zhengzhou University of Light Industry,Zhengzhou 450000,China;Nanyang Jinniu Electric Co.,Ltd.,Nanyang 473000,China)
出处
《半导体技术》
CAS
北大核心
2022年第9期692-698,共7页
Semiconductor Technology
基金
国家自然科学基金资助项目(U1904213,U20041102)
河南省科技发展计划资助项目(224300510009)。
关键词
ZNO
微波辅助法
恢复时间
三乙胺
气敏
ZnO
microwave-assisted method
recovery time
triethylamine
gas sensing