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基于ZnO的超快恢复三乙胺气敏传感器 被引量:2

Triethylamine Gas Sensor Based on ZnO with Ultra-Fast Recovery Time
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摘要 不同形貌ZnO纳米材料的合成对高性能气敏传感器的开发具有重要意义。采用微波辅助法合成了ZnO纳米微球和纳米棒,通过X射线衍射仪(XRD)、场发射扫描电子显微镜(FESEM)和紫外-可见分光光度计(UV-Vis)分别对材料的结构、形貌和光学性能进行表征,研究了两种形貌ZnO纳米材料的气敏性能。结果表明:ZnO纳米微球与ZnO纳米棒相比表现出良好的气敏性能,在370℃下对体积分数为100×10^(-6)的三乙胺灵敏度高达110.4,响应和恢复时间分别为18 s和2 s,检测限低至0.1×10^(-6),在长期的循环测试中ZnO纳米微球传感器可以保持较高的响应值、良好的稳定性和重复性。 The synthesis of ZnO nanomaterials with different morphologies is of great importance for the development of high-performance gas sensors.ZnO nano-microspheres and nanorods were synthesized by the microwave-assisted method and characterized via X-ray diffractometer(XRD),field emission scanning electron microscopy(FESEM)and UV-Vis spectrophotometer(UV-Vis)for their structures,morphologies and optical properties,respectively.The gas sensing performances of ZnO nanomaterials with two morphologies were investigated.The results show that compared with ZnO nanorods,ZnO nano-microspheres exhibit better gas sensing performance with high response of 110.4 to triethylamine with a volume fraction of 100×10^(-6)at 370℃.Response and recovery time are 18 s and 2 s,respectively,and the detection limit is as low as 0.1×10^(-6).The ZnO nano-microspheres sensor can maintain a high response value,good stability and reproducibility in a long-term cycling test.
作者 桂阳海 涂远生 田宽 郭会师 吴锦涛 赵帅帅 黄海 Gui Yanghai;Tu Yuansheng;Tian Kuan;Guo HuishiWu Jintao;Zhao Shuaishuai;Huang Hai(College of Materials and Chemical Engineering,Zhengzhou University of Light Industry,Zhengzhou 450000,China;Nanyang Jinniu Electric Co.,Ltd.,Nanyang 473000,China)
出处 《半导体技术》 CAS 北大核心 2022年第9期692-698,共7页 Semiconductor Technology
基金 国家自然科学基金资助项目(U1904213,U20041102) 河南省科技发展计划资助项目(224300510009)。
关键词 ZNO 微波辅助法 恢复时间 三乙胺 气敏 ZnO microwave-assisted method recovery time triethylamine gas sensing
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